- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
TEL UNITY-EP
used
- Manufacturer: Tokyo Electron - TEL
- Model: UNITY-EP
Process Module 3 TiN/Ti-CVD Wafer size: 8"
Yongin-si, South KoreaAMAT Centura 5200
used
- Manufacturer: Amat
- Model: Centura
CVD TiN (1 orienter, 1 multi cool chamber and 3 TiN chambers)
Yongin-si, South KoreaAMAT PRODUCER Standard
used
- Manufacturer: Amat
- Model: Producer
PRODUCER-STANDARD / SACVD 200mm Twin Chamber * 3
Yongin-si, South KoreaAMAT Centura 5200
used
- Manufacturer: Amat
- Model: Centura
Centura 5200 ILD / AMAT CENTURA 5200 standard mainframe body Narrow Body Loadlock Chamber / DLH process Chamber * 3 / MS Cool / HP+ Robot wafer handling assembly / System Controller/AC Power Box / RF Generator Rack
Yongin-si, South KoreaAMAT Centura 5200
used
- Manufacturer: Amat
- Model: Centura
WxZ process Narrow Body Loadlock / WxZ process Chamber 4 / MS Cooldown / HP Robot / System Controller/AC Power Box / RF Generator Rack (2MT501)
Yongin-si, South Korea2004 AMAT Centura
used
- Manufacturer: Amat
- Model: Centura
4 CH, Polycide(2 Poly + 2 Wsix), AP Wafer size: 300mm
Yongin-si, South Korea- Yongin-si, South Korea