- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
TEL UNITY-EP
used
- Manufacturer: Tokyo Electron - TEL
- Model: UNITY-EP
Process Module 3 TiN/Ti-CVD Wafer size: 8"
Yongin-si, South KoreaAMAT Centura 5200
used
- Manufacturer: Amat
- Model: Centura
CVD TiN (1 orienter, 1 multi cool chamber and 3 TiN chambers)
Yongin-si, South Korea- Yongin-si, South Korea
AMAT PRODUCER Standard
used
- Manufacturer: Amat
- Model: Producer
PRODUCER-STANDARD / DARC / PECVD 200mm Twin Chamber *3
Yongin-si, South KoreaAMAT CENTURA 5200
used
- Manufacturer: Amat
- Model: Centura
Centura 5200 ILD / AMAT CENTURA 5200 standard mainframe body Narrow Body Loadlock Chamber / DLH process Chamber * 3 / MS Cool / HP+ Robot wafer handling assembly / System Controller/AC Power Box / RF Generator Rack
Yongin-si, South Korea- Yongin-si, South Korea