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Oxford Plasmalab 80 Plus PECVD tools
used
- Manufacturer: Oxford
- Model: PlasmaLab 80
2x available PECVD 80+ SiO2 Dep - Non-functional tool but can be repaired (requires Silane MFC) - Designed for 4” wafers but can do 6” - Deposits SiO2 & SiH4 @ 300C - All MFCs for above processes are operational ...
United Kingdom Oxford Plasmalab 80 Plus PECVD
used
- Manufacturer: Oxford
- Model: PlasmaLab 80
Oxford Plasmalab 80 Plus PECVD System Wafer size: 200mm | Lead time: 8-10 weeks
Yongin-si, South Korea- Trusted SellerAsia