Used sorting technique

Oxford Instruments Plasmalab 800 Plus PECVD with 460mm diameter electrode (2009)

• Manufacturer: Oxford
• Model: PlasmaLab 800

Large Capacity Open Loaded Plasma Enhanced Chemical Vapor Deposition System. 460mm diameter electrode offers a capacity of up to twelve 4 in. wafers. Ideally suited for batch PECVD processing where excellent ac...