Used Etching Systems in South Korea

BMR BMR PLASMA

• Manufacturer: BMR

Process: HDPECVD | Chamber: 2 C/H | Shipping: EXW

GASONICS AURA 2000

• Manufacturer: GaSonics
• Model: AURA 2000

Wafer size: 8" | Process: ASHER | Shipping: EXW

2013 TEL VIGUS_PK2

• Manufacturer: Tokyo Electron - TEL

Wafer size: 12" | Process: OXIDE | Shipping: EXW

2006 AMAT DPS G5 MESA

• Manufacturer: Amat
• Model: DPS G5 MESA

Wafer size: 12" | Process: METRO | Shipping: EXW

2011 AMAT G5

• Manufacturer: Amat
• Model: G5

Wafer size: 12" | Process: Poly | Chamber: 4C/H | Shipping: EXW

2018 LAM LAM 2300 MWAVE STRPR

• Manufacturer: Lam Research - Novellus
• Model: 2300 MWAVE STRPR

Wafer size: 12" | Shipping: EXW

Plasmalab ICP380 & Plasmalab100 ICP Etcher 100 RIE+PECVD

• Manufacturer: OXFORD

Plasma Therm Versaline ICP-RIE #2 PSS ICP 4x4

• Manufacturer: Plasma-Therm