Used Mass Flow Controllers in Tokyo, Japan

Brooks 5877

• Manufacturer: Brooks

Gas CF4 flow rate 100 SCCM W210 D40 H130 Device name: Mass flow controller (MFC)

Horiba Tech Stec SEC-410-146

Gas: 4% PH3/Ar Flow: 250 CCM Device name: Mass flow controller (MFC)

Horiba Tech Stec SEC-410-146

Gas: 4% PH3/Ar Flow: 250 CCM Device name: Mass flow controller (MFC)

Horiba Tech Stec SEC-410-146

Gas: 4% PH3/Ar Flow: 250 CCM Device name: Mass flow controller (MFC)

Tylan FC-260

Gas: NH3　Flow rate: 1 SLM Device name: Mass flow controller (MFC)

Tylan FC-780

Gas: NH3　Flow rate: 1 SLM Device name: Mass flow controller (MFC)

Tylan FM-861

Gas: O2 Flow rate: 20 SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-400MK3

• Manufacturer: Horiba

Gas: O2 Flow: 5 L.M Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

• Manufacturer: Horiba

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-4400MC-UC

• Manufacturer: Horiba

Gas: SiH2Cl2 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

HORIBA STEC SEC-E440

Gas Ar Flow 50 SCCM W150 D32 H120 Device name: Mass flow controller

Tylan FC-781C

Gas N2 flow 50SLMW150 D40 H155 Device name: Mass flow controller