Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Hitachi Metals FCPI 980
- Manufacturer: Hitachi Metals
Manifold set: C4F8*50 SF6*500 N2*200 BCl3*200 ClF3*500 CL2*200 O2*5000 N2*10
Tokyo, Japan- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan
Tokyo, Japan
Unit UFC-1200
- Manufacturer: United Forms Corp
Gas: AR Flow: 100 SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:N2 Flow:100SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan

