Tokyo Electron - TEL P-12XL Specifications

Specifications

Wafer size compatibility100–300 mm
Supported wafer diameters100, 150, 200, 300
Probing stagesMotorized X-Y-Z with fine alignment
Probe card interfaceStandard probe card mounting
The above specifications are based on the 2000 model year.

Tokyo Electron - TEL P-12XL description

The Tokyo Electron TEL P-12XL is a precision semiconductor test system designed for accurate wafer-level measurements and probing. Built for production and R&D environments, it delivers stable handling and repeatable results while integrating with automated wafer handling and test workflows. The P-12XL focuses on throughput, alignment accuracy and ease of use for engineers verifying device performance at the wafer stage.

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