Photoresist Coating » Tokyo Electron - TEL » Lithius

Tokyo Electron - TEL Lithius Specifications

Specifications

Process capabilityphotoresist coating, pre/post-spin bake
Supported wafer sizes100-300 mm
Automationautomated wafer handling and cassette interface
Spin controlprogrammable spin profiles and acceleration
The above specifications are based on the 2005 model year.

Tokyo Electron - TEL Lithius description

The TEL Lithius is a precision photoresist coating tool designed for semiconductor front-end production. Built for repeatable, low-defect resist application and solvent handling, it integrates automated wafer handling, programmable spin profiles and process controls to support laboratory and production environments seeking consistent film uniformity and high uptime.

Currently For Sale

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    2006 TEL (Tokyo Electron Corp)

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    • Manufacturer: Tokyo Electron - TEL
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