Lithography (Photolithography) » Tokyo Electron - TEL » ACT-12

Tokyo Electron - TEL ACT-12 Specifications

Specifications

Wafer size200 mm
Process stepsCoating, Soft bake, Post-exposure bake, Development
Typical throughput80-200
Alignment capabilityManual/automatic process alignment
The above specifications are based on the 2000 model year.

Tokyo Electron - TEL ACT-12 description

The Tokyo Electron TEL ACT-12 is a compact photolithography track designed for resist coat and develop processes in semiconductor manufacturing. Engineered for reliable, repeatable film processing and high cleanliness, the ACT-12 streamlines coating, baking and development steps to support stable production runs and consistent process control.

Currently For Sale

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    TEL Tokyo Electron EHX Box

    TEL Tokyo Electron EHX Box Pressure Manometer Panel ACT12 Used Working

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-12

    TEL Tokyo Electron EHX Box Pressure Manometer Panel ACT12 Used Working Inventory # 11371 This TEL Tokyo Electron EHX Box Pressure Manometer Panel is used working surplus. Removed from a Tel Tokyo Electron ACT12 S...

    $1,006 USD
    Albuquerque, NM
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    TEL Tokyo Electron PHP Ejector

    TEL Tokyo Electron PHP Ejector Drive/Cooling Pneumatic Gas Panel ACT12 Working

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-12

    “Removed from a TEL Tokyo Electron Clean Track ACT12 System.” TEL Tokyo Electron PHP Ejector Drive/Cooling Pneumatic Gas Panel ACT12 Working Part No: Model No: PHP Ejector Drive/Cooling Panel Removed from a TEL T...

    $1,609 USD
    Albuquerque, NM
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    TEL Tokyo Electron PTI Controller

    TEL Tokyo Electron PTI Controller 2 ACT12 SENTRY 1000 TIM-100 PDPI Cu Untested

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-12

    “Removed from a TEL Tokyo Electron Clean Track ACT12 System. The SENTRY 1000 unit is missing the head screws and the whole upper is loose (see photos).” TEL Tokyo Electron PTI Controller 2 ACT12 SENTRY 1000 TIM-1...

    $2,506 USD
    Albuquerque, NM
  • Trusted Seller
    TEL Tokyo Electron Interface Rollers

    TEL Tokyo Electron Interface Rollers and Interface Bracket ACT12 Used Working

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-12

    Tokyo Electron Interface Rollers and Interface Bracket TEL ACT12 used working Inventory # AA-12506 This Tokyo Electron interface rollers and interface bracket is used working surplus. The physical condition is g...

    $609 USD
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  • Trusted Seller
    Tokyo Electron TEL Tokyo Electron

    Tokyo Electron TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 No End Effector

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-12

    United States
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