Deposition Equipment (CVD, PVD) » Lam Research - Novellus » Vector

Lam Research - Novellus Vector Specifications

Specifications

Process typePECVD, HDP‑CVD
Wafer size200 mm, 300 mm
Throughput40-120
Processing temperatureUp to 400 celsius
The above specifications are based on the 2001 model year.

Lam Research - Novellus Vector description

The Lam Research Novellus Vector is a high-throughput deposition platform designed for advanced semiconductor manufacturing. Built for uniform dielectric and gap-fill films, the Vector family delivers stable process control, repeatable film quality and throughput suited to production fabs. Its modular design supports a wide range of materials and recipes, making it ideal for applications from interlayer dielectrics to advanced packaging.

Currently For Sale

  • Trusted Seller
    2011 LAM Research Corp. Vector

    2011 LAM Research Corp. Vector Express

    • Manufacturer: Lam Research - Novellus
    • Model: Vector

    Vintage 2011 (multiple units available) Wafer size: 300mm Software version: 6.07B93_2.30B36 CIM: E84, SECS/GEM, GEM300, Interface A Process: TFM_Ashable HM Amorphous Carbon Hardware Configuration (Fab): Mai...

    United States
  • Trusted Seller
    Novellus Systems 16-132590-00N SHWRHD Pinned

    Novellus Systems 16-132590-00N SHWRHD Pinned 300mm WLDMNT Vector OEM Refurbished

    • Manufacturer: Lam Research - Novellus
    • Model: Vector

    “Manufacturer Refurbished” Novellus Systems 16-132590-00N SHWRHD Pinned 300mm WLDMNT Vector OEM Refurbished Inventory # AA-2763 This Novellus SHWRHD pinned 300mm is refurbished surplus. The physical condition of ...

    $3,205 USD
    Albuquerque, NM
  • Trusted Seller
    Novellus Systems 500100676 Right LTM

    Novellus Systems 500100676 Right LTM Assembly C3 Vector 300mm used working

    • Manufacturer: Lam Research - Novellus
    • Model: Vector

    Novellus 500100676 Right LTM Assembly C3 Vector 300mm used working Inventory # AA-5201 This Novellus 500100676 Right LTM assembly is used working surplus. There are minor blemishes and scratches on this unit from...

    $910 USD
    Albuquerque, NM
  • Trusted Seller
    Novellus Systems 500100675 Left LTM

    Novellus Systems 500100675 Left LTM Assembly C3 Vector 300mm used working

    • Manufacturer: Lam Research - Novellus
    • Model: Vector

    Novellus 500100675 Left LTM Assembly C3 Vector 300mm used working Inventory # AA-5200 This Novellus 500100675 left LTM assembly is used working surplus. There are minor blemishes and scratches on this unit from p...

    $910 USD
    Albuquerque, NM
  • Trusted Seller
    Novellus Systems C3 Vector Cable

    Novellus Systems C3 Vector Cable Kit 03-252223-00 03-291555-00 Set of 7 Used

    • Manufacturer: Lam Research - Novellus
    • Model: Vector

    Novellus C3 Vector Cable Kit 03-252223-00 03-291555-00 Set of 7 Used Working Inventory # AA-2797 This Novellus Vector cable kit is used working surplus. The physical condition of the cable kit is good and clean. ...

    $505 USD
    Albuquerque, NM
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