KLA-Tencor AIT Specifications

Specifications

ApplicationSemiconductor wafer inspection
TechnologyAutomated optical inspection
Compatible wafer sizes200,300
Defect sensitivitysub-micron
The above specifications are based on the 2000 model year.

KLA-Tencor AIT description

The KLA-Tencor AIT is an automated semiconductor inspection system designed to detect and classify wafer defects across front-end manufacturing. Built for production environments, the AIT streamlines inline inspection with fast throughput, repeatable results and integration capabilities for process control and yield improvement.

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