Used Mass Flow Controllers in Japan

HORIBA STEC Stec SEC-7330

2%Sih4/H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

2%Sih4/H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7350

H2,30SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-4600

H2,60SLM VCR Device name: Mass flow controller (MFC)

Tylan FC-770C

Air,200sccm,SW Device name: Mass flow controller

UB 5850E

CF4,10sccm VCR Device name: Mass flow controller

SAM SFC-280E4S

N2, 50sccm Device name: Mass flow controller

SAM SFC-580MO4VD

Ar 100sccm Device name: Mass flow controller

UB 5850E

O2,20sccm VCR Device name: Mass flow controller

SAM SFC-280E4S

Ar, 50sccm Device name: Mass flow controller

Horiba Stec PV-1502MC

• Manufacturer: Horiba

Device name: Mass flow controller (MFC)

MKS 1480A-25077

N2 40sccm Device name: Mass flow controller (MFC)

MKS 649A-27650

Piping unit set, He＊10SCCM Device name: Mass flow controller (MFC)

Tylan FC-781

H2 2SLM Device name: Mass flow controller (MFC)

Rintek MC-2100MO

H2 2SLM Device name: Mass flow controller (MFC)