KLA-Tencor P-22 Automated Surface Profiler in Decatur, GA, USA

KLA-TENCOR P-22 PROFILER consisting of: - Model: P-22 (P22)- Automated Surface Profilometer- Wafer Size: 8"/200mm - Automated Wafer Handler- 1 Open Loader for 200mm- Computer Controlled - Scan Method: Moving Stage, Stationary Stylus- Scan Length: 205mm (8 inches)- Scan Speed: 1 μm/sec to 25 mm/sec (0.04 mil/sec to 1 in/sec)- Sampling Rate: 50, 100, 200, 500, 1000 sample/sec nominal- Vertical Ranges- Resolution: ±3.2 μm / 0.5 Å (±0.13 mil/0.002 μin), ±13 μm / 2 Å (±0.51 mil/0.008 μin), 130 μm / 10 Å (±5.1 mil/0.04 μin)- Vertical Linearity: ±0.5% above 2000 Å, 10 Å below 2000 Å- Stylus Control: Programmable Force- MHII Range: 0.05-50 mg- Resolution: 0.1 mg- Programmable Descent Rate- Dual View Optics- Side View Optics 150-600x- Top View Optics 185-750x and 300-1200x (with User Interchangeable Lens)- Operations Manual- Available for Full Inspection and Demonstration!