Semitool Sirius System in Decatur, GA, USA
Used
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Specifications
- Condition
- used
- Stock number
- 4405
- Oem part #
- Sirius HydrOzone
- Oem name
- Semitool
- Subcategory
- Spin rinse dryers
- Listing ID
- 98410923
Description
SEMITOOL SIRIUS HYDROZONE SYSTEM consisting of:- Model: Sirius HydrOzone- Wafer Size: 150mm & 200mm wafer capable- Process: DI water/ozone- Rinse: DI water with ammonium hydroxide- Dry: N2- Spray processing chamber.- Uses a minimal amount of deionized water and ozone- Low cost, low environmental impact process used for photoresist stripping, photolithography rework and organic cleans- Does not require the use of sulfuric acid with its related delivery and disposal costs- Manufacturer Serial #: 222078- Year of Manufacture: 2004
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