EVG Gemini Automated Production Wafer Bonding System in Decatur, GA, USA
Used
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Specifications
- Condition
- used
- Stock number
- 4431
- Oem part #
- Gemini Wafer Bonder
- Oem name
- EVG
- Category
- Wafer Bonders in USA
- Subcategory
- Mask aligners & bonders
- Listing ID
- 98410820
Description
EVG GEMINI AUTOMATED PRODUCTION WAFER BONDING SYSTEM consisting of:- Fully automated operation - Interlocked doors with signal light tower - 4 Axis Industrial Robot - EVG CIM Framework Software GUI (Graphical User Interface) - Flexible process flow definition - Drag and drop recipe programming - Parallel processing of multiple jobs - Automated recording of process and machine parameters - Throughput optimized handling sequence - Password protected user access levels - Open cassette loading with empty/present sensor - Currently configured for 6" (150mm) wafers (4" and 8" optional with additional hardware) - Qty 8 bond chucks included for 6" wafers, additional chucks can be offered - SmartView®NT Alignment Module with 5x Objectives - 4 Bond modules with up to 550°C and 10kN bond force - Formic Acid Bubbler option for purging formic acid vapor into bond chamber - 1 purge gas line for process gas- CE Certified - System...