2001 SEZ SP304 in Singapore
Used
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Specifications
Description
Wafer size: 300mm
Very lightly used in OEM Lab in US; excellent condition as NEW.
1. Electrical power Main Unit: 400VAC, 3P+N, 32A,50/60Hz
2. Electrical Power CDS: 400VAC, 3P+N, 2A, 50/60Hz
3. 300mm wafer process chamber x1
4. 300mm ECO gripper loader/unloader x2
5. 300mm load port x2
6. Front monitor x1
7. FFU and Ion systems
8. CDS: chemical cabinets x3
9. Brooks wafer handling robot and robot controller CE-ATM407C-2 andESC-200
10. Flip module with ceramic end effector 2-sided
11. Medium dispenser arm x1
12. N2/DIW dispenser arm x2
13. 300mm standard pin chuck x1
14. Heating systems: single lauda system x2, double lauda systemx1
15. Rear monitor & access
16. Original manufacturer manual hard copies
17. MU and CDS software boots to manufacturer GUI
Last handled wafer on Sep-2020 before de-installation and crated