Kokusai Quixace Ultimate ALD SiO2 Vertical Diffusion Furnace in Asia

Inspect to confirm configuration and condition of tool.

Tool Model : QUIXACE (DJ-1236V-DF)

Process : ULT-SiO2

Software version: CX5000 (OU Ver.1.50.01) System power rating: 480 AC 3-Phase Loader configuration: 6 Loaders

Furnace Unit:

Cartridge Heater X 1
T/C for Heater Control X 5
T/C for Over temperature Protection X 5 4 5-P T/C for Cascasde Control X 1

5 Thyristor Unit for Control X 1

Clean Unit:

1 Clean Module Unit X 2

Controller:

Main Controller (OU) X 1
Main Operation Unit X 1
Sub Operation Unit X 1
Process Module Controller X 1
DDC Temperature Controller X 1
Gate Drive Unit X 1
MFC/ Pressure Unit X 1
FOUP Loader Controller Unit X 1 9 Valve/Interlock Control Unit X 1
Switching HUB X 1
Signal Tower (Front) X 1

14 Gas Flow Pattern Panel (Front, Rear) X 2 15 EDA Controller X 1

Drive Mechanisms:

I/O Shutter X 1
FOUP loader X 1
Rotation FOUP Storage X 1
FOUP Opener X 1
Wafer Transfer X 1
Wafer Detection X 1
Variable Wafer Pitch Converter X 1 8 Boat Elevator X 1
Furnace Port Shutter X 1
Boat Rotation X 1
Broken Wafer Detector X 1
Boat Changer X 1

Gas System:

Gas Unit (IGS) X 1
Tape Heater for gas pipe X 1 Set 3 Bubble Unit X 3

Exhaust System:

1 Dry Pump & Mechanical Booster Pump X 1 2 Diaphragm sensor (1000 Torr) X 1

Diaphragm sensor (10 Torr) X 1
Main Valve X 1
Exhaust Piping X 1
Exhaust Dilution Line X 1
Reactor Tube Press Leak Line X 1 8 Back Ground Line X 1

9 Jacket Heater for exhaust pipe X 1 Set 10 Seal Cap Heater X 1

Safety:

Light Curtain System X 1
Safety PLC X 1

Other:

OHT I/F Unit X 2
CIDRW Controller X 1
RF-ID Amp Unit X 2

CIDRW CONTROLLER X 2 5 CIDRW Head X 2
Chemical Filter X 2