Suss MicroTec MA150e Automated Mask Aligner in Bree, Wexford, Ireland
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Description
Suss MicroTec MA150e Automated Mask Aligner
Highly Accurate Lithography Solution For High-Volume Production
The MA150e Gen2 platform is the industry standard for highly accurate lithography processes in very price sensitive markets.
It combines high precision alignment and customized substrate handling for fragile, warped and transparent wafers with the reliability of a matured industry standard. With its high power, high resolution exposure optics the MA150e Gen2 stands out from the competition especially when looking at performance in thick film applications.
HIGHLIGHTS
+ Leading edge pattern recognition for minimized operator assistance
+ High throughput of 145 wph by simultaneous wafer handling
+ Excellent CD uniformity through industry leading light uniformity and highly precise gap control
Year 2007