Building Filters
- Tokyo, Japan
2006 ULVAC ei-5
- Manufacturer: Ulvac
- Model: EI-5
Manufacturing process: film deposition | Inch: Square Substrate
Tokyo, Japan- Tokyo, Japan
- Tokyo, Japan
2010 SAMCO PD-3800L
- Manufacturer: Samco
- Model: PD-3800L
Manufacturing process: film deposition | Inch: 3
Tokyo, Japan