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Used Lithography (Photolithography) in South Korea

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    2001 TEL ACT8

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-8

    Wafer size: 8

    Yongin-si, South Korea
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    2003 TEL ACT8

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-8

    Wafer size: 8

    Yongin-si, South Korea
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    2013 TEL ACT8

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-8

    Wafer size: 8

    Yongin-si, South Korea
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    TEL Mark-8

    • Manufacturer: Tokyo Electron - TEL

    Mark-8(DUV)

    Yongin-si, South Korea
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    DNS DNS SK-80BW-BVP

    • Manufacturer: Dainippon Screen
    • Model: SK-80BW-BVP

    Wafer size: 6

    Yongin-si, South Korea
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    DNS DNS SK-80BW-BVPE

    • Manufacturer: Dainippon Screen
    • Model: SK-80BW-BVPE

    Wafer size: 6

    Yongin-si, South Korea
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    2006 LEICA INS-3000 DUV Dual

    • Manufacturer: Leica

    Wafer size: 8

    Yongin-si, South Korea
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    DNS SK-80B-BVPF

    • Manufacturer: Dainippon Screen
    • Model: SK-80B-BVPF

    Wafer size: 8

    Yongin-si, South Korea
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    TEL Act12

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-12

    Wafer size: 12

    Yongin-si, South Korea
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    2007 TEL ACT12

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-12

    Wafer size: 12

    Yongin-si, South Korea
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    2003 TEL ACT8

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-8

    Wafer size: 8

    Yongin-si, South Korea
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    2000 TEL ACT 12

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-12

    Yongin-si, South Korea
  • 2013 IMAGE

    2013 IMAGE

    • Manufacturer: Orbotech

    Orbotech Paragon X-Press LDI

    Seoul, South Korea
  • 2014 CANON FPA-5510IX

    2014 CANON FPA-5510IX

    • Manufacturer: Canon
    • Model: FPA

    CANON FPA-5510ix SN-4101032 Wafer size: 8", 12" | Process: stepper

    Gyeonggi-do, South Korea
  • Wintel EUV

    Wintel EUV

    • Manufacturer: Wintel

    LPR (Low-Pressure Removal) PE ALD Poly Etcher HARC Doped ACL EER EUV Key Technologies ① Chamber contamination free ② High selectivity ③ rework rate: ＞10 times ④ Design to under layer strip

    Gyeonggi-do, South Korea
23456