- Trusted Seller

KLA Tencor Surfscan 6200 Particle Inspection System
- Manufacturer: KLA-Tencor
- Model: Surfscan 6200
KLA-TENCOR SURFSCAN 6200 PARTICLE INSPECTION SYSTEM consisting of:- Model: 6200 Surfscan- Particle Inspection System- Max Wafer Capable: 8”/200mm- System configured for 8“/200mm wafers- Defect Sensitivity: 0.12um...
Decatur, GA - Trusted Seller

1997 KLA-Tencor Surfscan 6220 Defect Inspection System
- Manufacturer: KLA-Tencor
- Model: Surfscan 6220
- Windows 98 SE - Software Version 4.2 - Previously refurbished in 2016 - Laser replaced in March of 2020 - Last PM performed August of 2023 1997 Vintage 2", 3", 4", 6", 8"
United States - Trusted Seller

1997 KLA Surfscan 6220
- Manufacturer: KLA-Tencor
- Model: Surfscan 6220
KLA-Tencor Equipment Model: Surfscan 6220 Type: Defect Inspection System Wafer Size: 2", 3", 4", 6", 8" Equipment Configuration: - Windows 98 SE - Software Version 4.2 - Previously refurbished in 2016 - La...
United States - Trusted Seller

KLA-Tencor Corp. Surfscan SP2.5+
- Manufacturer: KLA-Tencor
- Model: Surfscan SP2
Particle Measurement Metrology Equipment Currently Configured for: 300mm · Defect Inspection · Two Load Ports · SECS/GEM Capability · Integration to Klarity/UDB · Auto DSA · High resolution 3D imaging of ...
United States 
KLA-TENCOR SURFSCAN 6220 (SFS 6220)
- Manufacturer: KLA-Tencor
- Model: Surfscan 6220
KLA-Tencor Surfscan 6220 (SFS 6220) Wafer Surface Contamination Analysis System The SFS 6220 tool is used for wafer surface contamination analysis of unpatterned semiconductor wafers. System is calibrated, tes...
- Trusted Seller

1985 KLA SURFSCAN 6220
- Manufacturer: KLA-Tencor
- Model: Surfscan 6220
Wafer Size 200 mm Fab Section Metrology Tool Status Running Wafers Asset Description PCT0009(SMP-CTECH) Software Version WIN95 CIM GEM Process DO MEASUREMENT Options System NA OK Others LPT 1 OK Main Sys...
Asia - Trusted Seller

1994 KLA Surfscan 6200 Particle Counter
- Manufacturer: KLA-Tencor
- Model: Surfscan 6200
8" - 0.1 micron Defect Sensitivity (PSL STD) - 0.02 ppm Haze Sensitivity - 0.002 ppm Haze Resolution - Accuracy within 1% - XY coordinates - Lock Down accessories - Tencor approved blower assembly - 30mW ...
Asia 
1994 KLA TENCOR SFS 6200
- Manufacturer: KLA-Tencor
- Model: Surfscan 6200
*.Configuration: - Non-patterned surface Inspection System. - 0.1 micron Defect Sensitivity (PSL STD). - 0.02 ppm Haze Sensitivity. - 0.002 ppm Haze Resolution. - Accuracy within 1%. - XY coordinates. - Lock Down...
Cheonan-si, South Korea
1994 KLA TENCOR SFS 6200
- Manufacturer: KLA-Tencor
- Model: Surfscan 6200
*.Configuration: - Non-patterned surface Inspection System. - 0.1 micron Defect Sensitivity (PSL STD). - 0.02 ppm Haze Sensitivity. - 0.002 ppm Haze Resolution. - Accuracy within 1%. - XY coordinates. - Lock Down...
Cheonan-si, South Korea

