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KLA-TENCOR Surfscan 5500
- Manufacturer: KLA-Tencor
- Model: Surfscan 5500
- Model 5500 Main System - Can handle from 2" up to 8"/200mm wafers - Submicron sensitivity, detects 0.2 micron particles - Surface haze detected as low as 0.3 ppm. - Handles high scattering surfaces such as ...
United States

