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KLA Tencor Surfscan 6200 Particle Inspection System
- Manufacturer: KLA-Tencor
- Model: Surfscan 6200
KLA-TENCOR SURFSCAN 6200 PARTICLE INSPECTION SYSTEM consisting of:- Model: 6200 Surfscan- Particle Inspection System- Max Wafer Capable: 8”/200mm- System configured for 8“/200mm wafers- Defect Sensitivity: 0.12um...
Decatur, GA 
KLA-TENCOR SURFSCAN 6220 (SFS 6220)
- Manufacturer: KLA-Tencor
- Model: Surfscan 6220
KLA-Tencor Surfscan 6220 (SFS 6220) Wafer Surface Contamination Analysis System The SFS 6220 tool is used for wafer surface contamination analysis of unpatterned semiconductor wafers. System is calibrated, tes...

