Used processing in Georgia, USA

KLA-Tencor Surfscan SP1 DLS Unpatterned Surface Inspection System

• Manufacturer: KLA-Tencor
• Model: Surfscan SP1

KLA-TENCOR SURFSCAN SP1 DLS UNPATTERNED SURFACE INSPECTIONSYSTEM consisting of:- Model: SP1 DLS with 300mm Single FOUP/FIMS Handler (other handlers available)- Currently Configured for 200/300mm Wafers - Unpatter...