Used Lithography (Photolithography)

2001 TEL CLEAN TRACK ACT8

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Vintage: 2000 (2) 2001 (15) 2002 (1) Wafer size: 8" Configuration overview: frame Process overview: photo track Tool status: running

Karl Suss ACS200 Classic

• Manufacturer: SÜSS MicroTec
• Model: ACS 200

ACS200 Classic (2 DEV, 1 RC8 spinner, Set of Hot/Cold Plates) 200mm As-is or refurb

2001 TEL ACT8 (4C3D)

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

2007 Hitachi HL8000M

• Manufacturer: Hitachi
• Model: HL-8000M

E-Beam Litho 6" RETICLE MASK LINE

TEL ACT 8 type II controller

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

See video Operational 3 Months warranty Wafer size: 200mm

Suss ACS-200

• Manufacturer: SÜSS MicroTec
• Model: ACS 200

Coater and developer (1C1D) 200mm

DNS SK2000

• Manufacturer: Dainippon Screen
• Model: SK-2000

Coater and developer (4C4D) 200mm

1999 Tel ACT 8

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Wafer size; 8" Process: track Condition: part tool

TEL Act 8

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Coat / Developer 6"

DNS SK-3000-AV

• Manufacturer: Dainippon Screen
• Model: SK-3000

COATER/DEVELOPER

2002 Hitachi HL7000M

• Manufacturer: Hitachi
• Model: HL-7000M

9" RETICLE MASK LINE AS IS E-Beam litho

2005 Hitachi HL7800M

• Manufacturer: Hitachi
• Model: HL-7800M

6" RETICLE MASK LINE AS IS E-Beam litho

2003 Hitachi HL7000M

• Manufacturer: Hitachi
• Model: HL-7000M

E-Beam Litho 9" RETICLE MASK LINE

Ultratech Reticle Cleaner

• Manufacturer: Ultratech

Wafer size: 6.0

Perkin Elmer PE661 Aligner

• Manufacturer: Perkin Elmer

Wafer size: 6.0