Related Events
by Perfection Global, LLC
Gas: O2 Flow: 3LM Device name: Mass flow controller (MFC)
Gas: O2 Flow rate: 5 SLM Device name: Mass flow controller (MFC)
Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)
Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)
Gas:N2 Flow rate:200CCM Device name: Mass flow controller (MFC)
Gas:50%SiH4/N2 Flow rate:1SLM Device name: Mass flow controller (MFC)
Gas:N2 Flow rate:1LM Device name: Mass flow controller (MFC)
Gas:H2 Flow rate:200CCM Device name: Mass flow controller (MFC)