
- Manufacturer: Lam Research - Novellus
- Model: 2300 EXELAN
Wafer size: 8
Yongin-si, South Korea

- Manufacturer: Nicolet
- Model: ECO 1000S
Wafer size: 8
Yongin-si, South Korea

- Manufacturer: Tokyo Electron - TEL
- Model: TE5000ATC
Wafer size: 6
Yongin-si, South Korea

- Manufacturer: Lam Research - Novellus
- Model: TORUS 300K
Gyeonggi-do, South Korea

- Manufacturer: Lam Research - Novellus
- Model: TORUS 300S
Gyeonggi-do, South Korea