Building Filters
- Trusted Seller
LAM 490 (LAM AUTO ETCHER) computer Base, RF Generator, Chiller
- Manufacturer: Lam Research - Novellus
Used, looks complete, very clean 6INCH WAFER
United States - Trusted Seller
LAM 490 (LAM AUTO ETCHER) computer Base, RF Generator, Chiller
- Manufacturer: Lam Research - Novellus
Used, looks complete, very clean 6INCH WAFER
United States - Trusted Seller
Branson 4450/2
- Manufacturer: Branson
BRANSON 4450/2 DOWN STREAM PLASMA ETCHER (5) SHELVES, 7X17″DEEP DUAL GAS PM119 RF GENERATOR REBUILT VACUUM PUMPS ALSO IN STOCK (HYDROCARBON OR FOMBLIN/KRYTOX)
Billerica, MA - Trusted Seller
BRANSON 2005 PLASMA ETCHER/ASHER
- Manufacturer: Branson
BRANSON BRANSON 2005 PLASMA ETCHER/ASHER PM 119 RF GENERATOR (500 WATTS) 10″ DIAM X 20″DEEP QUARTZ CHAMBER 3 GAS CAPABLILITY INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL
Billerica, MA - Trusted Seller
LAM 590 Etcher
- Manufacturer: Lam Research - Novellus
Original Equipment Manufacturer : Lam Research Condition : AS IS condition(No chiller, no pump, With ENI OEM 12 RF Generator) Wafer Size: 4,5,6 inch capability. Valid Time : Subject to prior sale Lead Time : Read...
Trim, Ireland 
2008 Dry Etcher ULVAC NE5000N
- Manufacturer: Ulvac
GAS BOX CONFIG GAS 1: AREA FC-780C 50 SCCM Cl2 GAS 2: AREA FC-780C 50 SCCM SiCl4 GAS 3: AREA FC-780C 50 SCCM CH2Cl2 GAS 4: AREA FC-770AC 200 SCCM O2 GAS 5: AREA FC-770AC 50 SCCM SF6 GAS 6: AREA FC-770AC 100...
Wu Xi Shi, China
2012 ICP Etcher ULVAC NE950
- Manufacturer: Ulvac
GAS BOX CONFIG GAS 1 HORIBA STEC SEC-E40 Ar 100SCCM GAS 2 HORIBA STEC SEC-E40 O2 100SCCM GAS 3 HORIBA STEC SEC-E40 CHF3 100SCCM GAS 4 HORIBA STEC SEC-E440J BCL3 200SCCM GAS 5 HORIBA STEC SEC-E440J CL2 200SCC...
Wu Xi Shi, China
2011 SPTS/STS MUC-21 ETCHER
- Manufacturer: SPTS
GAS BOX CONFIG GAS 1: UNIT UFC-8101 100 SCCM Ar GAS 2: UNIT UFC-8101 100 SCCM O2 GAS 3: UNIT UFC-8101 600 SCCM SF6 GAS 4: UNIT UFC-8101 400 SCCM C4F8 GAS 5: MKS 649A-26199 N2 TURBO PUMP TURBO PUMP: LEYBOLD...
Wu Xi Shi, China- Trusted Seller
2003 Oxford PlasmaLab System 133+ RIE Reactive Ion Etcher
- Manufacturer: Oxford
Model Year : 2003 Quantity : 1 Condition : Refurbished with OEM specifications Supports wafer sizes up to 300mm (330mm Platen) RIE set up for GaN Etch RF Power: 600W, 13.56MHz Water cooled electrode 10C-80C...
Asia - Trusted Seller
2004 Oxford PlasmaLab System 133+ RIE CL Reactive Ion Etcher
- Manufacturer: Oxford
Was refurbished with OEM specifications Configuration: Supports wafer sizes up to 300mm (330mm Platen) Mechanical chuck RIE set up for GaN Etch RF Power: 600W, 13.56MHz Water cooled electrode 10C-80C End p...
Asia - Trusted Seller
2006 Oxford PlasmaLab System 100 RIE (FL) Reactive Ion Etcher
- Manufacturer: Oxford
Condition : Refurbished with OEM specifications Configuration: - Supports wafer sizes up to 300mm (330mm Platen) - RIE set up for SiO2 Etch - RF Generator : Advanced Energy RFX 600A ; 600W, 13.56MHz, - Chamber ...
Asia - Trusted Seller
TRION PHANTOM II RIE ICP REACTIVE ION ETCHER w INDUCTIVELY COUPLED PLASMA SOURCE
- Manufacturer: Trion
TRION TECHNOLOGY PHANTOM II RIE ICP REACTIVE ION ETCHER w INDUCTIVELY COUPLED PLASMA SOURCE Unit Specifications Make: Trion Technology Model: Phantom II Type: Reactive Ion Etcher (RIE) Configured and comes w...
Asia Branson/IPC L-3100/L-2100
- Manufacturer: Branson
Plasma Barrel Stripper, 12" X 20" Quartz Chamber, 1000W RF P/S
Yongin-si, South KoreaTEL TELUnityIIe 85 DD
- Manufacturer: Tokyo Electron - TEL
Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) ENI RF Generator / Two(2) ENI Special Automation Matching Network / One(1) N...
Yongin-si, South KoreaTEL Unity II 85 TPA
- Manufacturer: Tokyo Electron - TEL
Polymide Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) Daihen RF Generator / Two(2) Daihen Automation Matching Network / Two(2) SM...
Yongin-si, South Korea