Tokyo, Japan
Tokyo, Japan
ULVAC Ulvac CRYO-U8HSP
- Manufacturer: Ulvac
- Model: CRYO-U8HSP
Device name: Cryopump | Production no.: 0707518
Tokyo, Japan
ULVAC Ulvac CRYO-U6H
- Manufacturer: Ulvac
- Model: CRYO-U6H
Device name: Cryopump | Production no.: 0707094D
Tokyo, Japan- Tokyo, Japan
Tokyo, Japan
Edwards E2M18
- Manufacturer: Edwards
- Model: E2M18
3-phase 200V, with connector for oil filtration Device name: Rotary pump
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan

