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Used processing

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    ASM International Eagle-12 Rapidfire

    • Manufacturer: Eagle

    Wafer size: 300mm Asset HDD not included [Chamber A] Process: P-TEOS Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 4...

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