Overview
Probe stations are precision platforms used to position micromanipulated probes onto semiconductor wafers, chips, or packaged devices for electrical testing. They provide stable work surfaces, thermal chucks, vacuum hold, and microscope integration to enable accurate contact and measurement. Models range from manual desktop stations to automated multi‑site systems, and they interface with oscilloscopes, parameter analyzers, and probe cards for development, failure analysis, and production test tasks.
FAQ
What should I check when buying a used probe station?
Inspect stage motion, microscope optics, probe alignment, chuck flatness, vacuum integrity, and controller function. Ask for maintenance records, probe card compatibility, software versions, and example test setups. Verify parts availability and whether calibration certificates are included.
How should a probe station be shipped to avoid damage?
Transport should use a climate-controlled, vibration-damped crate with internal bracing for the microscope, stage, and delicate electronics. Remove loose probes, secure moving axes, pack consumables separately, and hire carriers experienced with lab/semiconductor equipment. Insure the shipment and document serial numbers before pickup.
What regular maintenance and calibration are required?
Keep optics and probes clean, maintain vacuum seals, lubricate guideways per manual, and exercise motion axes. Schedule periodic stage flatness and position accuracy calibration, verify thermal chuck temperature accuracy, and update software/firmware. Replace worn probe tips and consumables to maintain measurement integrity.
