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1995 CANON ANELVA ILD-4033
- Manufacturer: Anelva
Dry etching system (SiO2)
Yongin-si, South Korea
1984 TOKYO OHKA OAPM-302B
- Manufacturer: TOKYO OHKA
Dry etching system (SiN)
Yongin-si, South Korea
1995 Applied Materials P-5030
- Manufacturer: Amat
Dry etching system (AL)
Yongin-si, South Korea
1984 TOKYO OHKA OAPM-303B
- Manufacturer: TOKYO OHKA
Dry etching system (SiN)
Yongin-si, South Korea
1985 CANON ANELVA ILD-4003M
- Manufacturer: Anelva
Dry etching system (ILD-4003M)
Yongin-si, South Korea
1995 CANON ANELVA ILD-4033
- Manufacturer: Anelva
Dry etching system (ILD-4033)
Yongin-si, South Korea
1994 Yokogawa Electric Rainbow-4500
- Manufacturer: Yokogawa
Dry etching system (R-4500)
Yongin-si, South Korea
1998 Yokogawa Electric Rainbow-4420
- Manufacturer: Yokogawa
Dry etching system (R-4420)
Yongin-si, South Korea
1989 CANON ANELVA ILD-4032
- Manufacturer: Anelva
Dry etching system (ILD-4032)
Yongin-si, South Korea
1989 Applied Materials PE-8330A
- Manufacturer: Amat
Dry etching system (AL)
Yongin-si, South Korea
1992 Applied Materials P-5020E
- Manufacturer: Amat
Dry etching system (Poly Si)
Yongin-si, South Korea
1984 CANON ANELVA ILD-4002
- Manufacturer: Anelva
Dry etching system (Poly Si)
Yongin-si, South Korea
1984 TOKYO OHKA OAPM-301B
- Manufacturer: TOKYO OHKA
Dry etching system (O2/CF4 treatment)
Yongin-si, South Korea
1989 CANON ANELVA ILD-4032
- Manufacturer: Anelva
Dry etching system (Mo)
Yongin-si, South Korea
1984 TOKYO OHKA OAPM-306B
- Manufacturer: TOKYO OHKA
Dry etching system (SiN)
Yongin-si, South Korea

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