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Gas O2 flow rate 150 SCCM W130 D32 H127 Device name: Mass flow controller
Gas SiH4 flow rate 500 SCCM W130 D25 H110 Device name: Mass flow controller
Gas SiH2Cl2 Flow 100 SCCM W125 D33 H150 Device name: Mass flow controller
Gas SiH2Cl2 Flow 200 SCCM W125 D31 H127 Device name: Mass flow controller
Gas SiH2Cl2 Flow 100 SCCM W155 D33 H175 Device name: Mass flow controller
Gas SiN2Cl2 Flow 100 SCCM W155 D33 H175 Device name: Mass flow controller
Gas N2 Flow 5LMW115 D25 H122 Fittings Swagelok 1/4
Gas N2 O2 Air Flow 500SCCM W100 D30 H65 Device name: Mass flow controller
Device name: Mass flow controller (MFC)
N2 40sccm Device name: Mass flow controller (MFC)
Piping unit set, He＊10SCCM Device name: Mass flow controller (MFC)
H2 2SLM Device name: Mass flow controller (MFC)
H2, 50 L/min Device name: Mass flow controller (MFC)
H2 100SLM Device name: Mass flow controller (MFC)
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan