Used Mass Flow Controllers in Tokyo, Japan

Tylan FM-860

Gas SiH4 flow rate 300 SCCM W150 D40 H180 Device name: Mass flow controller

Tylan FC-770AC

Gas CF4 flow rate 200 SCCM W130 D32 H127 Device name: Mass flow controller

Tylan FM-860

Gas SiH4 flow rate 300 SCCM W150 D40 H180 Device name: Mass flow controller

Tylan FC-780C

Gas SF6 flow rate 50 SCCM W135 D32 H123 Device name: Mass flow controller

Tylan FC-780C

Gas SiH4 flow rate 300 SCCM W150 D40 H180 Device name: Mass flow controller

Horiba Stec SEC-E4400-MO

Gas HCl Flow 1LMW135 D32 H130VA1F36 Device name: Mass flow controller

Tylan FC-260

Gas B2H6 flow 500 SCCM W130 D25 H110 Device name: Mass flow controller

Horiba Etech SEC-510-X

Gas O2 flow 20 LMW160 D31 H135 fitting Swagelock 1/4

Tylan FC-260

Gas 5% SiH4/N2 flow rate 3 SLM W130 D25 H110 Device name: Mass flow controller

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas: He Flow: 100 SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas: He Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

Gas:HBr Flow rate:100SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

Gas:HCI Flow rate:2SLM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HCL Flow rate:100SCCM Device name: Mass flow controller (MFC)