Used Mass Flow Controllers in Tokyo, Japan

HORIBA STEC Stec SEC-400MK3

Gas: O2 Flow: 5 L.M Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-4400MC-UC

Gas: SiH2Cl2 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Yamatake Yamatake CMQ

• Manufacturer: Azbil - Yamatake

Air 200 ml/min Device name: Mass flow controller (MFC) | Remarks: Parts extraction

UB 5850E

O2,20sccm VCR Device name: Mass flow controller

SAM SFC-280E4S

Ar, 50sccm Device name: Mass flow controller

Horiba Stec PV-1502MC

Device name: Mass flow controller (MFC)

Horiba Stec PV-1501MC

Device name: Mass flow controller (MFC)

堀場エステック Stec SEC-Z521XN

N2O 101SLM Device name: Mass flow controller (MFC)

堀場エステック Stec SEC-Z521XN

NO 101SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-Z511X

• Manufacturer: Horiba

O2 10SLM Device name: Mass flow controller (MFC)

SAM SFC480EMC-4VM

H2 5SLM Device name: Mass flow controller (MFC)