Used Mass Flow Controllers in Tokyo, Japan

MKS M100B00752CS1BV

Gas: H2 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

Tylan FC-260

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:50%SiH4/N2 Flow rate:1SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-7330M

Gas: B2H6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas CF4 flow rate 100 SCCM W210 D40 H130 Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas: He Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

Gas:HBr Flow rate:100SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

Gas:HCI Flow rate:2SLM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HCL Flow rate:100SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:N2 Flow rate:1LM Device name: Mass flow controller (MFC)

Tylan FC-781C

Gas:H2 Flow rate:10SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400-MO

Gas: CHF3 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:5SLM Device name: Mass flow controller (MFC)