Used Mass Flow Controllers in Tokyo, Japan

Tylan FC-770AC

Gas Ar flow 20 SCCM W120 D32 H125 Device name: Mass flow controller

Tylan FC-260

Gas HCl flow rate 1 SLMW130 D25 H110 Device name: Mass flow controller

Hitachi Metals SFC-480

Gas Ar Flow 1000 SCCM W120 D32 H140 Device name: Mass flow controller

Edwards 825

• Manufacturer: Edwards

Gas Ar flow rate 50 SCCM W130 D25 H160 Device name: Mass flow controller

Horiba Stec SEC-7440MC

Gas WF6 Flow 100 SCCM W133 D31 H127 Device name: Mass flow controller

Horiba Stec SEC-4400RO

Gas O2 Flow 500 SCCM W230 D45 H140 Device name: Mass flow controller

Horiba Tech SEC-500MK3

Gas H2 flow rate 10lMW150 D60 H180 Device name: Mass flow controller

Tylan FC-860

Gas NH3 flow 500 SCCM W155 D33 H175 Device name: Mass flow controller

Tylan FC-780C

Gas NH3 Flow 500 SCCM W125 D33 H150 Device name: Mass flow controller

Tylan FC-761

Gas N2 Flow 10SLM W150 D40 H180 Device name: Mass flow controller

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas CHF3 Flow rate 100 SCCM W150 D40 H180 Device name: Mass flow controller

Tylan FC-770AC

Gas O2 flow rate 150 SCCM W130 D32 H127 Device name: Mass flow controller

Tylan FC-260

Gas SiH4 flow rate 500 SCCM W130 D25 H110 Device name: Mass flow controller

Tylan FC-780C

Gas SiH2Cl2 Flow 100 SCCM W125 D33 H150 Device name: Mass flow controller