Used unit in Japan

Canon Canon Aligners GAP Unit
- Manufacturer: Canon
Device name: Aligner GAP Unit
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:HCL Flow rate:100SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:N2 Flow rate:5SLM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:N2 Flow rate:3SLM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1200
- Manufacturer: United Forms Corp
Gas: AR Flow: 100 SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1200
- Manufacturer: United Forms Corp
Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1200
- Manufacturer: United Forms Corp
Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:N2 Flow:100SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:N2 Flow rate:300SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:N2 Flow rate:3SLM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1200
- Manufacturer: United Forms Corp
Gas: AR Flow rate: 500 SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan