Building Filters
HORIBA STEC, Co., Ltd. SEC-Z700X Series
- Manufacturer: Horiba
Pressure Insensitive Mass Flow Controller The SEC-Z700X Series is equipped with reliable thermal sensors and a pressure insensitive function for stable flow rate control. The on-board pressure measurement reduces...
Kyoto, Japan
HORIBA STEC, Co., Ltd. GR-300 Series
- Manufacturer: Horiba
Wafer Back Side Cooling System The GR-300 Series can control gases used to cool the back side of wafers that are fixed in position by an electrostatic chuck system. The stability and accuracy of the GR-300 makes ...
Kyoto, Japan
HORIBA STEC, Co., Ltd. EC-5000 Series
- Manufacturer: Horiba
Exhaust Pressure Controller The EC-5000 series exhaust pressure controller can maintain a consistent pressure, of the user’s choice, within the chamber. The high-resolution stepper motor and unique butterfly valv...
Kyoto, Japan
HORIBA STEC, Co., Ltd. UR-Z700 Series
- Manufacturer: Horiba
Digital Automatic Pressure Regulator The UR-Z700 Series is the auto pressure regulator equipped with a digital control circuit that uses a high-accuracy pressure sensor and a high-resolution, fast-response piezoe...
Kyoto, Japan
HORIBA STEC, Co., Ltd. D700WR
- Manufacturer: Horiba
Wide Range Pressure Insensitive Mass Flow Module The D700WR installs a new restrictor designed specifically for a wide range control application with high accuracy performance based on the CRITERION™ technology. ...
Kyoto, Japan
HORIBA STEC, Co., Ltd. MV-2000
- Manufacturer: Horiba
Mixed Injection System Liquid Vaporizer The MV-2000 achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging...
Kyoto, Japan
HORIBA Advanced Techno Co., Ltd. HE-960LC
- Manufacturer: Horiba
Carbon Sensor Conductivity Meter A low-concentration conductivity meter that incorporates highly chemical-resistant carbon sensors. Ideal for the recovery of chemicals and pure water in semiconductor manufacturin...
Kyoto, Japan
HORIBA STEC, Co., Ltd. TU Series
- Manufacturer: Horiba
Test Gas Generation Systems The test gas generation systems in the TU Series include a test gas generation system for evaluating the performance of various kinds of gas sensors, as well as systems for generating ...
Kyoto, Japan
HORIBA Advanced Techno Co., Ltd. HF-960EM
- Manufacturer: Horiba
In-line Sensor & Auto Range Switching Concentration Monitor A hydrofluoric acid concentration monitor that complies with the sanitary standards for semiconductor processes. Incorporating a sensor with complet...
Kyoto, Japan
HORIBA Advanced Techno Co., Ltd. HE-960H-KOH
- Manufacturer: Horiba
KOH Monitor High precision, wide-range KOH monitor having chemical resistance sensor. Measurement range : 0 - 20%. Wide range measurement Concentration: 0 - 20%, Conductivity: 0 - 1000 mS/cm High precision PFA Se...
Kyoto, Japan
HORIBA Advanced Techno Co., Ltd. HE-960CA
- Manufacturer: Horiba
Citric Acid Monitor High precision, wide-range citric acid monitor having chemical resistance sensor. Measurement range : 0 - 2%. Wide range measurement Concentration: 0 - 2%, Conductivity: 0 - 10 mS/cm High prec...
Kyoto, Japan
HORIBA STEC, Co., Ltd. VC Series
- Manufacturer: Horiba
Direct Liquid Injection System The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system. HORIBA can provi...
Kyoto, Japan
HORIBA Advanced Techno Co., Ltd. HE-960H-TM
- Manufacturer: Horiba
Wide range TMAH Concentration Monitor A TMAH concentration monitor ideal for developer solution TMAH concentration management. Featuring a highly chemical-resistant 4-pole carbon sensor, allowing the measurement ...
Kyoto, Japan
HORIBA Advanced Techno Co., Ltd. HE-960R-GC(W)
- Manufacturer: Horiba
Carbon Sensor Resistivity Meter The ideal resistivity meter for the cleaning process in a one-bath cleaning system. Concerns about contamination from metal impurities are eliminated with the use of a glass carbon...
Kyoto, Japan
HORIBA Advanced Techno Co., Ltd. HE-960RW-GC(W)
- Manufacturer: Horiba
2-Channel Resistivity Meter A resistivity meter designed for ultrapure water management, capable of 2-channel simultaneous measurements. Employing a chemical-resistant glass carbon sensor. With a single transmit...
Kyoto, Japan