Building Filters

81

Used etch/ash/clean plasma processing

  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    Status: Tool is at T&H warehouse, de-instlled on 2010 Jun 14 Key parameter Items: 1) Chamber Base Pressure(mTorr) PC&= 40 2) Chamber leak rate(mTorr/min) PC&= 40 3) Susceptor Temperature Control 90 degrees C ±10 ...

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    Novellus / Gasonics PEP 3510A Strip/Ash System SN 98040 • Currently Configured for 200mm Wafer Sizes • MFG Date: Jul 1997 • Last PM Date: Oct 27, 2008 • Install Type: Stand Alone • Application: Photoresist Remova...

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    Novellus / Gasonics PEP 3510+ Dual Chamber High Throughput Downstream Photoresist Removal System SN M981580 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    System is currently idle in the Fab.

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    • Currently Configured for 200mm Wafer Sizes • MFG Date: Jan 1997 • CE Marked • Last PM Date: Nov 5, 2008 • Install Type: Stand Alone • Application: Photoresist Removal • Software version: V3.71 • Cassette Interf...

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    • Currently Configured for 200mm Wafer Sizes • MFG Date: Dec 1996 • Last PM Date: Nov 13, 2008 • Install Type: Stand Alone • Application: Photoresist Removal • Software version: v3.71 • Cassette Interface: o (2) ...

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    • Currently Configured for 200mm Wafer Sizes • MFG Date: Dec 1996 • Last PM Date: Sep 16, 2008 • Install Type: Stand Alone • Application: Photoresist Removal • Software version: v3.71 • Wafer Handler: Dual Blade ...

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    • Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT 4.0 • System software (App): 5.6/3.4 • Cassette Interface: o (2) ...

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    • Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): TBD • Cassette Interface: o (2) 200mm (...

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    • Currently configured for 200mm (8in) wafer sizes • MFG Date: 2000 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): 4.11 • Cassette Interface: o (2) 200mm ...

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    • Currently configured for 200mm (8in) wafer sizes • MFG Date: 1997 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): TBD • Cassette Interface: o (2) 200mm (...

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    • Currently configured for 200mm (8in) wafer sizes • MFG Date: 1997 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win2K • System software (App): 5.9.2 • Cassette Interface: o (2) 200mm (...

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    Tool was de-installed on October 1st, 2014. Tool is stored in a storage room in Fab 15. Confirmed with Fab 15 tool is missing parts as of Feb 12th, 2015 and there is no modification record as of January 22nd, 201...

    Bree, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    Novellus / Gasonics PEP 3510+ Dual Chamber High Throughput Downstream Photoresist Removal System SN M923300 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

    Bree, Ireland
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