Used etch/ash/clean plasma processing

StripperAsher

• Manufacturer: Unknown

• Currently Configured for 200mm Wafer Sizes • MFG Date: Dec 1996 • Last PM Date: Nov 13, 2008 • Install Type: Stand Alone • Application: Photoresist Removal • Software version: v3.71 • Cassette Interface: o (2) ...

StripperAsher

• Manufacturer: Unknown

• Currently Configured for 200mm Wafer Sizes • MFG Date: Dec 1996 • Last PM Date: Sep 16, 2008 • Install Type: Stand Alone • Application: Photoresist Removal • Software version: v3.71 • Wafer Handler: Dual Blade ...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT 4.0 • System software (App): 5.6/3.4 • Cassette Interface: o (2) ...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): TBD • Cassette Interface: o (2) 200mm (...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 2000 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): 4.11 • Cassette Interface: o (2) 200mm ...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1997 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): TBD • Cassette Interface: o (2) 200mm (...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1997 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win2K • System software (App): 5.9.2 • Cassette Interface: o (2) 200mm (...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1997 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): 5.6 • Cassette Interface: o (2) 200mm (...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): 5.6 • Cassette Interface: o (2) 200mm (...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): 5.6 • Cassette Interface: o (2) 200mm (...

StripperAsher

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): 5.6 • Cassette Interface: o (2) 200mm (...

StripperAsher

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510+ Dual Chamber High Throughput Downstream Photoresist Removal System SN M981580 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

StripperAsher

• Manufacturer: Unknown

System is currently idle in the Fab.

StripperAsher

• Manufacturer: Unknown

StripperAsher

• Manufacturer: Unknown

Tool was de-installed on October 1st, 2014. Tool is stored in a storage room in Fab 15. Confirmed with Fab 15 tool is missing parts as of Feb 12th, 2015 and there is no modification record as of January 22nd, 201...