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Ulvac
- Manufacturer: Ulvac
Batch type equipment of chemical dry cleaning for remoral of native oxide in Narrow and Deep-contact patterns of advanced semiconductor. Damage-free (remote plasma and low-temperature process) High throughput and...
Munich, GermanyUlvac
- Manufacturer: Ulvac
A complete lineup including a research system for materials development, a cluster system for low-volume production, and an in-line system for mass-production. The lineup supports a complete range of organic EL a...
Munich, Germany
Ulvac
- Manufacturer: Ulvac
Dry etching system for high volume production with good cost performance and wide selection of tool configuration. GaN Recess with selectivity to AlGaN >350 precise etch stop using laser interferometry EPD low da...
Munich, GermanyUlvac
- Manufacturer: Ulvac
Combined deposition and etch modules’ system of cluster type for advanced electronics uGmni-200, 300 Sputtering System, Load-lock type uGmni is to equip with a variety of different process modules on the same tra...
Munich, Germany
