Used automation in Chuo City, Tokyo, Japan

Horiba Estec Stec PAC-41

Year Marking: Specs:.

MITSUBISHI GT15-75QBUSL

• Manufacturer: Mitsubishi
• Model: GT15

Year Marking: Specs:.

ANELVA ANELVA A-230M-LD

• Manufacturer: Anelva

Year Marking: Specs:.

Lintec MC-2300RC-4.0-C3

• Model: MC-2300

Year Marking: Specs:.

Vacuum components

Year Marking: Specs:.

HORIBA STEC Stec SEC-7330

Sih4 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7350

H2,30SLM Device name: Mass flow controller (MFC)

UB 5850E

O2,20sccm VCR Device name: Mass flow controller

SAM SFC-280E4S

Ar, 50sccm Device name: Mass flow controller

ULVAC Ulvac Heliot 701

• Manufacturer: Heliot

Year: 2008 Specs:.

NACHI Robot

• Manufacturer: Nachi

Device name: robot

Edwards Edwards TIC INST CONT 40W

• Manufacturer: Edwards

Year Marking: Specs:.