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Used automated in Tokyo, Japan

  • Tylan FC-780

    Tylan FC-780

      Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

      Tokyo, Japan
    • Tylan FC-770AC

      Tylan FC-770AC

        Gas: He Flow: 100 SCCM Device name: Mass flow controller (MFC)

        Tokyo, Japan
      • Tylan FC-780C

        Tylan FC-780C

          Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

          Tokyo, Japan
        • Unit UFC-1100

          Unit UFC-1100

          • Manufacturer: United Forms Corp

          Gas:HCL Flow rate:100SCCM Device name: Mass flow controller (MFC)

          Tokyo, Japan
        • Unit UFC-1100

          Unit UFC-1100

          • Manufacturer: United Forms Corp

          Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)

          Tokyo, Japan
        • Unit UFC-1100

          Unit UFC-1100

          • Manufacturer: United Forms Corp

          Gas:N2 Flow rate:5SLM Device name: Mass flow controller (MFC)

          Tokyo, Japan
        • Unit UFC-1100

          Unit UFC-1100

          • Manufacturer: United Forms Corp

          Gas:N2 Flow rate:3SLM Device name: Mass flow controller (MFC)

          Tokyo, Japan
        • Horiba Stec SEC-4400M

          Horiba Stec SEC-4400M

            Gas:SiCl4 Flow rate:300SCCM Device name: Mass flow controller (MFC)

            Tokyo, Japan
          • Horiba Stec SEC-410LP

            Horiba Stec SEC-410LP

              Gas: SiCl4 Flow: 300 CCM Device name: Mass flow controller (MFC)

              Tokyo, Japan
            • Horiba Stec STEC SEC-4400RO

              Horiba Stec STEC SEC-4400RO

                Gas: CI2 Flow: 50SCCM Device name: Mass flow controller (MFC)

                Tokyo, Japan
              • Horiba Stec SEC-4400M

                Horiba Stec SEC-4400M

                  Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

                  Tokyo, Japan
                • Horiba Stec SEC-4400R

                  Horiba Stec SEC-4400R

                    Gas:CF4 Flow rate:100SCCM Device name: Mass flow controller (MFC)

                    Tokyo, Japan
                  • Horiba Stec STEC SEC-4400MO

                    Horiba Stec STEC SEC-4400MO

                      Gas: CF4 Flow: 300 SCCM Device name: Mass flow controller (MFC)

                      Tokyo, Japan
                    • Horiba Stec Stec SEC-410

                      Horiba Stec Stec SEC-410

                        Gas:H2 Flow rate:200CCM Device name: Mass flow controller (MFC)

                        Tokyo, Japan
                      • Horiba Stec SEC-4400R

                        Horiba Stec SEC-4400R

                          Gas: O2 Flow rate: 10000 SCCM Device name: Mass flow controller (MFC)

                          Tokyo, Japan
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