Used Mass Flow Controllers in Japan

UB 5850E

O2,20sccm VCR Device name: Mass flow controller

SAM SFC-280E4S

Ar, 50sccm Device name: Mass flow controller

Brooks 5877

• Manufacturer: Brooks

Gas O2 flow 1000 SCCM W170 D34 H120 Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas O2 flow 100 SCCM W170 D34 H120 Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-Z511X

O2 10SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

Sih4 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7350

H2,30SLM Device name: Mass flow controller (MFC)

SAM SFC-580MO4VD

O2 20sccm Device name: Mass flow controller

Tylan FC-770C

Air,200sccm,SW Device name: Mass flow controller

UB 5850E

CF4,10sccm VCR Device name: Mass flow controller

SAM SFC-280E4S

N2, 50sccm Device name: Mass flow controller

SAM SFC-580MO4VD

Ar 100sccm Device name: Mass flow controller

HORIBA STEC Stec SEC-7330

H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

H2 500sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

HCI 1SLM Device name: Mass flow controller (MFC)