1995 Tel MK7-S
used
- Manufacturer: Tokyo Electron - TEL
missing parts: 2 resist pumps, 1Developer Line Add. Info: TYP AM/C Typ FC-9801F#1SD/HD Typ CommandpostSystem Vers. MK8G2.38Alarm File ALM00166.OENSp. Al.File AL00TT.OENGEM 1.72Lines 1(3)Pumps 1xminiEBR programabl...
Regensburg, Germany1995 Tel MK7-S
used
- Manufacturer: Tokyo Electron - TEL
missing parts: 2 resist pumps, 1Developer Line Add. Info: TYP A1M/C Typ FC-9801F#1SD/HD Typ CommandpostSystem Vers. MK8G2.38Alarm File ALM00166.OENSp. Al.File AL00TT.OENGEM 1.72Lines 1(3)Pumps 1xminiEBR programab...
Regensburg, Germany- Regensburg, Germany
2011 PVA SPA Waferscale WS200 (MET902-01)
used
Waferscale for 8" Wafer STD + Taiko Wafer weighing system - Filmthickness
Regensburg, Germany2004 Canon LITVC1-02
used
- Manufacturer: Canon
TEL ACT12 - Double Block - 300mm + LITVC1-02 Canon FPA- 5500iZ+
Regensburg, Germany- Regensburg, Germany
- Regensburg, Germany
2004 LAM Research Corp. Allian
used
- Manufacturer: Lam Research - Novellus
Minimum: 150 mm | Maximum: 200 mm | Set size: 200 mm | Number of chambers: 0 | Process capabilities: 4 Chamber System | Controller type: PC Controller Type | Software revision level: Next | Power requirements: 3...
Regensburg, Germany- Regensburg, Germany
2016 LAM Research Corp. WETV18-04
used
- Manufacturer: Lam Research - Novellus
SEZ 304 Minimum: 150 mm | Maximum: 300 mm | Set size: 300 mm | Number of robots: 1 | Tank material: PVDF | Automatic wafer transfer: YES | Controller type: Microprocessor Controller Type | Other information: the ...
Regensburg, Germany2008 LAM Research Corp. 2300 Kiyo
used
- Manufacturer: Lam Research - Novellus
- Model: 2300 KIYO
Semiconductor ETC Chamber with RF Cart Incl. Gasbox and Rocker Valve
Regensburg, Germany1995 CDE CDE80/2 Plasma Etch
used
- Manufacturer: CDE
The system was in production until February 2025. Plasma Etch
Regensburg, Germany1996 ASM Advance 400
used
- Manufacturer: ASM
- Model: ADVANCE 400
ASM Furnace Vertical 2 Reactor atmospheric Reactor 1 is missing heater cassette, Motor driver, Board and loader arm
Regensburg, Germany2000 ASM Advance 400
used
- Manufacturer: ASM
- Model: ADVANCE 400
ASM Furnace Vertical - Advance 400 2x Reactor Dot. Poly Low Pressure
Regensburg, Germany1999 ASM Advance 400
used
- Manufacturer: ASM
- Model: ADVANCE 400
ASM Furnace Vertical - Advance 400 2 Reactors atmospheric
Regensburg, Germany