Used Mass Flow Controllers in Tokyo, Japan

Tylan FC-781C

Gas:H2 Flow rate:10SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400-MO

• Manufacturer: Horiba

Gas: CHF3 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:5SLM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:3SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

• Manufacturer: Horiba
• Model: SEC-4400M

Gas:SiCl4 Flow rate:300SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-410LP

Gas: SiCl4 Flow: 300 CCM Device name: Mass flow controller (MFC)

Horiba Stec STEC SEC-4400RO

Gas: CI2 Flow: 50SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

• Manufacturer: Horiba
• Model: SEC-4400M

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400R

Gas:CF4 Flow rate:100SCCM Device name: Mass flow controller (MFC)

Horiba Stec STEC SEC-4400MO

Gas: CF4 Flow: 300 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

• Manufacturer: Horiba

Gas:H2 Flow rate:200CCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas: O2 Flow: 3LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421

• Manufacturer: Horiba

Gas: O2 Flow: 1000 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-510

• Manufacturer: Horiba

Gas:N2 Flow rate:20LM Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 200 SCCM　Gas: N2 Device name: Mass flow controller (MFC)