Used Mass Flow Controllers

Horiba Stec SEC-4401M

Gas: CH3OH Flow rate: 100 CCM Device name: Mass flow controller (MFC)

Tylan FC-780

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-F440M

Gas: 2%B2H6/N2 Flow: 1L/min Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas O2 flow 1000 SCCM W170 D34 H120 Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas O2 flow 100 SCCM W170 D34 H120 Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas: He Flow: 100 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: AR Flow: 100 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow:100SCCM Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 500 SCCM Gas: AR Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 200 SCCM Gas: AR Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:N2 Flow rate:200CCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400-RC

Gas: CCI4 Flow: 50 SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas:SiH4 Flow rate:100SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)