Used Mass Flow Controllers in Japan

Horiba Stec SEC-4400MC

Gas: BCI3 Flow rate: 200 CCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400RC

Gas: CHF3　Flow rate: 200 CCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-410Z

Gas: SiH4 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421

Gas: SF6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

MKS M100B02852CS1BV

Gas: CH4 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

MKS M100B00752CS1BV

Gas: H2 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

Tylan FC-260

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:50%SiH4/N2 Flow rate:1SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-7330M

Gas: B2H6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas CF4 flow rate 100 SCCM W210 D40 H130 Device name: Mass flow controller (MFC)

HORIBA STEC SEC-E440

Gas Ar Flow 50 SCCM W150 D32 H120 Device name: Mass flow controller

Tylan FC-781C

Gas N2 flow 50SLMW150 D40 H155 Device name: Mass flow controller