New Etching Systems in South Korea

Poly Etcher System (Conductor Etcher System)

• new

Developing and supplying equipment with increasing demand in accordance with market trend We have secured the lineup of Poly Etcher System for 300mm Wafer to keep up with the increasing demand.

Oxide Etcher System (Dielectric Etcher System)

• new

Metal Etcher System

• new

Wintel Poly Etcher

• new

• Manufacturer: Wintel

LPR (Low-Pressure Removal) PE ALD Poly Etcher HARC Doped ACL EER EUV Application : DPT, QPT, Hard mask etch etc. Excellent Uniformity ＜1% (Concentric profile) Improved wafer edge uniformity : Wide plasma generati...